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Wafer Stocker

Wafer Stocker
12'' FOUP/8” CST

wafer storage

  1. Use around the production line
  2. 100 Lots, removable mobile
  3. •RFID / UHF RFID reader
  4. •12'' FOUP/CST, 8” CST
  5. • Various export configurations are available
  6. •E84, SECS/GEM