OHT and AMR Handling Robot

Fabs are automated factories that use automated Material handling systems (AMHS). The overhead chip Carrier (OHT) system is widely used to transport 8/12" wafer boxes (open cassette/FOUP) from one set of devices to another.

AMHS transport is generally divided into Interbay and Intrabay, OHS is responsible for Interbay, as a process area transport system; OHT+AMR is responsible for Intrabay, which is currently used not only for intra-process transport, but also for inter-process or inter-plant transport.

To achieve OHT coverage in the whole plant, the cost of AMHS system will be very high (a simple estimate, an 8-inch AMHS is about $10M, and a 12-inch AMHS is about $30M). This is also a great test for IE planning in the factory.

Therefore, Gyro specializes in semiconductor wafer handling robots and collaborates with FAB OHT, that is, aerial OHT with ground AMR, to realize automatic material handling of the whole plant more fully, and the comprehensive cost performance is relatively high. At present, Gyrobot has worked with a number of OHT manufacturers (Muratec, Mirle, etc.) to achieve FAB workshop docking and collaboration, and improve the efficiency of semiconductor factory automation production.

OHT crane is responsible for high-speed transmission operations on the air track, and AMR achieves high elastic efficiency operations on the ground, realizing no dead Angle or blind spot docking between STOCKER, OHT, AMR and EQ, truly realizing unmanned automatic production in the FAB workshop.

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