Semiconductor Intelligent Gas Analysis and Detection Robot

semiconductor wafer production requires a highly sophisticated environment. Dust, temperature and gas will all highly affect the quality and efficiency of production.

,is a highly integrated software and hardware of the gas analyzer, and can automatically replace the function of the gas analysis module and expand the image analysis software.. 24-hour inspection and real-time reporting system for the whole factory.

unmanned handling has been widely used in manufacturing, medical treatment, logistics and other related industries, and its application scope also extends from transportation and handling to inspection and monitoring through robot intelligence and integrated visual and olfactory sensing devices.

Autonomous Mobile Robotuses ROS robot system as the driving core, with high-precision laser scanner (LIDAR) and various high-precision sensing elements, and integrates machine learning and navigation technology (SLAM),enables robots to quickly scan and create maps and actively avoid obstacles in unfamiliar fields. You can also dynamically re-plan the path autonomously, and the additional control area on the map prohibits robots from entering.

product features:

■ Complete integration of robot and gas analysis module
■ customized selection and integration of different gas analysis and monitoring targets
■ With laser natural map positioning and navigation system, active obstacle avoidance, autonomous dynamic re-planning of the path
■ Autonomous speed regulation, which can adjust the speed according to the path width and obstacle distance to ensure safety and flexibility
■ The wheel is made of super wear-resistant PU material for clean room, which is not easy to wear and antistatic.

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